| Model
SC 23 - Covered Chuck Spin Coater
DESCRIPTION:
The SC-23,
equipped with a specially designed covered chuck system,
is the optimal tool for uniform coatings. Turbulence-related
non-uniformities such as streaks, comets, striations,
and splatters are eliminated. The consumption of Liquid
Film Chemicals is greatly reduced, with a 70% reduction
demonstrated in some applications. Ideal for applications
with square, rectangular, or other irregularly shaped
substrates, the SC-23 will uniformly coat into corners
with no discernable edge bead. The covered chuck system
eliminates the need for nested chucks and its associated
backside contamination and particulates. This coater's
multiple options make it adaptable to various applications
and budget requirements. The SC-23 is suited for Flat
Panel Display, photomask, wafer, GaAs, leading edge
MultiChip Module, advanced Printed Wire Board and PCB
applications.
FEATURES:
Substrate sizes from 12" x 12" to 16"
x 16" square, or from 6" x 6" to 12"
x 12" square
Coating uniformity < ± 2.0%
Spin speeds to 10-2,000 RPM; Accelerations to 1,000
RPM/S
Automation Ready with Substrate raising/lowering, chuck
indexing and RS232 communications
Microprocessor Controlled with 8 Process Programs: 5
preset and 3 custom, all 8 having programmable step
parameters
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